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The influences of the thermal annealing to the gas-sensing properties of SnO_2/Fe_2O_3 multi-layer films, grown by plasma CVD, and to the structure of the transition interface layer between SnO_2 and Fe_2O_3 layers have been studied. The formation of the interface is attributed to the effects of the plasma during the deposition.
The influences of the thermal annealing to the gas-sensing properties of SnO 2 / Fe 2 O 3 multi-layer films, grown by plasma CVD, and to the structure of the transition interface layer between SnO 2 and Fe 2 O 3 layers have been studied. The formation of the interface is attributed to the effects of the plasma during the deposition.