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高精细度超稳光学参考腔是获得超窄线宽激光的核心部件.本文报道了面向空间应用的高精细度球形超稳光学参考腔自主化研制及其初步测试结果.设计球形腔体直径为80 mm,腔长78 mm,采用平-凹腔镜结构,凹镜曲率半径为0.5 m.使用有限元方法计算了该参考腔的震动敏感度,最佳支撑位置的震动敏感度小于1×10~(-10)/g.采用超光滑表面三级抛光技术实现光学表面粗糙度小于0.4 nm(rms)的超精密加工,采用双离子束溅射法实现工作波长反射率大于99.999%、损耗小于4 ppm腔镜镀膜,干式光胶方法键合腔体和腔镜.利用扫腔线宽法和腔衰荡法对参考腔的线宽和精细度进行了测量,结果表明该参考腔的精细度约为195000,线宽为9.8 kHz.将698 nm半导体激光器锁定到该参考腔上测得其损耗<5 ppm.与实验室进口同类型参考腔相比较,主要性能指标与其相当.
High-precision ultra-stable optical reference cavity is the core of ultra-narrow laser linewidth.This paper reports the development and preliminary test results of high precision spherical ultra-stable optical reference cavity for space applications.Design of spherical cavity diameter 80 mm, cavity length 78 mm, the use of flat - concave mirror structure, concave mirror radius of curvature of 0.5 m. Using the finite element method to calculate the vibration sensitivity of the reference cavity, the best support position vibration sensitivity of less than 1 × 10 ~ (-10) / g.Using ultra-smooth surface three-stage polishing technology to achieve ultra-precision machining with optical surface roughness less than 0.4 nm (rms), dual-beam sputtering method is used to achieve the working wavelength reflectivity greater than 99.999% 4 ppm cavity mirror coating and dry glue method were used to bond the cavity and the cavity mirror.The width and fineness of the reference cavity were measured by the method of sweeping cavity width and cavity ringing.The results show that the reference cavity is fine With a gain of about 195000 and a linewidth of 9.8 kHz, the 698 nm semiconductor laser is locked to the reference cavity and its loss is <5 ppm. Compared with the same type of reference cavity imported from the laboratory, the main performance indicators are comparable.