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利用调Q的Nd…YAG激光器输出的1064nm纳秒脉冲激光聚焦在石英上采用激光诱导等离子体法加工微通道,加工出的微通道在显微镜下没有观察到热裂纹,通道深度可达4mm。强激光辐照石英,石英吸收激光能量气化、电离,形成等离子体,发生光学击穿,高温等离子体烧蚀石英形成微通道。研究了强激光辐照下等离子体形成的机理以及介电常数、折射率、反射率等光学性质,分析了光学击穿的关键自由电子密度,并计算了光学击穿长度。
The Q-switched Nd: YAG laser output of 1064 nm nanosecond laser focused on quartz by laser-induced plasma processing of microchannels. The processed microchannels were observed under the microscope with no hot cracks, and the depth of the channels was up to 4 mm. Strong laser irradiation quartz, quartz absorbs laser energy gasification, ionization, the formation of plasma, optical breakdown occurs, high temperature plasma ablation of quartz to form microchannels. The mechanism of plasma formation under high laser irradiation and the optical properties of dielectric constant, refractive index and reflectivity were studied. The key free electron density of optical breakdown was analyzed and the optical breakdown length was calculated.