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表面三维形貌的评定是表面计量学中的一个重要课题。本文在一般表面的数学模型的基础上提出了一组表面三维形貌参数,并利用相应的测量与处理系统实测了多种典型加工表面。文中列举了实测结果并将轮廓参数与三维形貌参数进行了比较。
Surface three-dimensional topography assessment is an important topic in surface metrology. In this paper, a set of surface three-dimensional topography parameters are proposed based on the general surface mathematical model, and a variety of typical machining surfaces are measured by using the corresponding measurement and processing system. The paper lists the measured results and compares the profile parameters with the three-dimensional topography parameters.