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用三维电子输运Ｍｏｎｔｅ－Ｃａｒｌｏ（ＭＣ）方法研究了双向四电子束泵浦ＫｒＦ准分子激光器ＭＯＰＡ系统中主放大器（Ｈ１Ｍ）的能量沉积空间分布。计入了Ｈｉｂａｃｈｉ结构和主膜的影响。对０．５ＭｅＶ的电子，泵浦方向能量沉积基本均匀，而在轴向，因为两窗口间的１４ｃｍ“死区”使得能量沉积呈“马鞍形”，峰谷比为２～３。给出了能量沉积的总量及能量沉积效率与电子束能的关系曲线，为Ｍａｒｘ发生器的二极管电压进行优化设计提供了依据。
The energy deposition spatial distribution of the main amplifier (H1M) in a bidirectional four-electron-beam KrF excimer laser MOPA system was studied by the Monte-Carlo (MC) method using three-dimensional electron transport. The impact of the Hibachi structure and the main film is factored into. For 0.5 MeV electrons, the energy deposition in the pump direction is substantially uniform, whereas in the axial direction, the energy deposition is “saddle-shaped” due to the 14 cm “dead zone” between the two windows with a peak to valley ratio of 2 to 3. The total amount of energy deposition and the relationship between energy deposition efficiency and electron beam energy are given, which provides the basis for the optimization design of the diode voltage of Marx generator.