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将平面对称光学系统的像差理论应用于极紫外(XUV)光栅仪器的评价函数,可以得到评价函数关于光学参量的解析表达式。应用合作型协同进化遗传算法来解决多参量评价函数的优化问题,建立了优化程序。应用该程序对XUV摄谱仪系统进行优化设计,并运用光线追迹程序Shadow对该光学系统进行数值成像计算和比较,研究结果表明发展的评价函数在XUV多元件光栅光学系统优化设计中是十分有效的。
The theory of aberration of plane-symmetric optical system is applied to the evaluation function of extreme ultraviolet (XUV) grating instrument, and the analytic expression of the evaluation function about the optical parameters can be obtained. Cooperative coevolutionary genetic algorithm is used to solve the optimization problem of multi-parameter evaluation function, and an optimization program is established. The program was used to optimize the design of the XUV spectrometer system and the numerical imaging of the optical system was performed by using ray tracing program Shadow. The results show that the development evaluation function is very good in the optimization design of the XUV multi-element grating optical system Effective.