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用射频偏压溅射在较高氧压下沉积的六角密排结构的Ｃ轴平行于衬底的混合晶向结构的多晶ＺｎＯ薄膜，对紫外光的照射有较快的光响应．在此ＺｎＯ膜上再沉积层氮掺杂的ＺｎＯ膜，可使其光响应得以大大改善．
The C-axis of hexagonal close-packed structure deposited at higher oxygen pressure by radio-frequency bias sputtering is parallel to the polycrystalline ZnO thin film with mixed crystal orientation of the substrate, and has a fast photoresponse to ultraviolet light irradiation. Re-depositing a layer of nitrogen-doped ZnO film on the ZnO film can greatly improve its light response.