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采用高精度PLINT高温微动磨损试验机研究了690合金及其表面等离子体化学气相沉积(PCVD)制备TiN/TiSiN多层膜的高温微动磨损特性。结果表明,试验温度(25、200、300℃)下TiN/TiSiN多层膜XRD未检测出氧化物,TiN/TiSiN多层膜的硬度和临界载荷分别为2318 HV0.05、57 N。690合金在200℃时的摩擦因数、磨损体积均高于室温和300℃下的值。TiN/TiSiN多层膜的摩擦因数在200℃时最大,在室温时最低;TiN/TiSiN多层膜磨损体积受温度影响较小。相同试验条件下,TiN/TiSiN多层膜摩擦因数和磨损体积均低于690合金,TiN/TiSiN多层膜能有效减低基材的微动损伤。室温时,690合金磨损机制为磨粒磨损和剥层;200℃时为磨粒磨损、剥层和氧化磨损;300℃时为磨粒磨损和氧化磨损。试验温度下,TiN/TiSiN多层膜的磨损机制均为剥层。
The high-temperature fretting wear behavior of TiN / TiSiN multilayers fabricated by 690 alloy and its surface-enhanced plasma CVD (PCVD) was studied with a high-precision PLINT high temperature fretting wear tester. The results show that the TiN / TiSiN multilayers do not detect oxides at the test temperature (25,200 and 300 ℃). The hardness and critical load of TiN / TiSiN multilayers are 2318 HV0.05 and 57N, respectively. The friction coefficient and wear volume of 690 alloy at 200 ℃ are higher than those at room temperature and 300 ℃. The friction coefficient of TiN / TiSiN multilayers is the highest at 200 ℃ and the lowest at room temperature. The wear volume of TiN / TiSiN multilayers is less affected by the temperature. Under the same experimental conditions, the friction coefficient and wear volume of TiN / TiSiN multilayers are both lower than that of 690 alloy. TiN / TiSiN multilayers can effectively reduce the fretting damage of the substrate. At room temperature, the wear mechanism of the 690 alloy is abrasive wear and delamination; abrasive wear, delamination and oxidative wear at 200 ° C; abrasive wear and oxidative wear at 300 ° C. Under the test temperature, the wear mechanism of TiN / TiSiN multilayers is delamination.