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采用非平衡磁控溅射离子镀技术,当碳靶电流在0.2~.0.8 A范围,在Al Zn4.5Mg轴承合金和单晶硅Si(100)表面制备Cp/Al Sn复合镀层。通过X射线衍射(XRD),扫描电子显微镜(SEM)以及X射线光电子能谱(XPS)分别对复合镀层的相组成,微观形貌及化学态进行表征。结果表明:复合镀层为等轴晶结构;其相组成主要为均匀分布的铝、锡和碳3种相;X射线光电子能谱分析表明,在Cp/Al Sn复合镀层中,铝和锡2种元素主要以单质形态存在,碳元素以sp2和sp3 2种杂化形式存在,其中以sp2杂化为主。
Unbalanced magnetron sputter ion plating technique was used to fabricate Cp / Al Sn composite coating on the surface of Al Zn4.5Mg bearing alloy and Si (100) when the carbon target current ranged from 0.2 to 0.8 A. The phase composition, microstructure and chemical state of the composite coating were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The results show that the composite coating is an equiaxed crystal structure. The phase composition is mainly composed of three phases of aluminum, tin and carbon. X-ray photoelectron spectroscopy analysis shows that in the Cp / Al Sn composite coating, Elemental elements mainly exist in the form of elemental elements, while carbon elements exist as sp2 and sp3 hybrids, of which sp2 hybrids are the major elements.