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介绍电子回旋共振（ＥＣＲ）微波放电等离子体中离子向衬底输运的蒙特卡罗模型，该模型考虑了精确依赖于离子能量的电荷交换和动量转移截面以及中性区与鞘层的衔接。通过模拟氩离子在中性区与鞘层内的输运过程，在碰撞鞘层基础上着重分析了衬底偏压对鞘层内电势、离子能量分布和离子运动的角分布等鞘层特性和离子行为的影响。这些结果对ＥＣＲ等离子体的实际应用也有一定的参考意义
The Monte Carlo model of ion transport to substrate in electron cyclotron resonance (ECR) microwave discharge plasma is introduced. The model considers the charge exchange and momentum transfer cross sections which depend on the ion energy accurately and the connection between the neutral region and the sheath. By simulating the transport process of argon ions in the neutral zone and the sheath, based on the collision sheath, the sheath characteristics such as the potential distribution, the ion energy distribution and the angular distribution of ion motion in the sheath were emphatically analyzed. Effect of ion behavior. These results have certain reference value for the practical application of ECR plasma