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本文给出了集成光学声光频谱分析器的基本结构与工作原理.给出了集成光学芯片上各种集成光学元件和导波声光调制器的制作技术,并给出了组装一体化样机的结构工艺要点
This article gives the basic structure and working principle of an integrated optical and acoustic spectrum analyzer. The fabrication technology of various integrated optical components and guided acousto-optic modulator on integrated optical chip are given, and the key points of the structure of the integrated prototype are given