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金属／绝缘层／硅（ＭＩＳ）隧道发光二极管的发光机理可以归结为表面等离极化激元（ＳＰＰ）与界面粗糙度的耦合．电流－电压特性曲线中６．５Ｖ附近的一个负阻和发射光谱中４７５ｎｍ的峰显示，在硅／二氧化硅界面激发起了与之相应的等离子体振荡．
The luminescent mechanism of the metal / insulator / silicon (MIS) tunneling LED can be attributed to the coupling of surface plasmon polariton (SPP) to interface roughness. A negative resistance near 6.5 V in the current-voltage characteristic and a peak at 475 nm in the emission spectrum showed that plasma oscillations were excited at the silicon / silicon dioxide interface.