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几何量计量技术大量应用于光学制造业以检测零件质量和控制生产过程,是光学制造业的核心技术,涉及微纳米结构的几何量计量以及平面、球面、非球面、直纹曲面及自由曲面的面形计量.本文综述了德国联邦物理技术研究院支撑光学制造的部分计量技术.介绍了一种测量范围为25 mm×25 mm×5 mm的计量型大范围原子力显微镜(AFM),可灵活多样地测量各种微纳结构.介绍了一种新颖的AFM探针(ACP),可实现微纳结构侧壁形貌的直接、无损测量.介绍了一种应用Flared AFM探针的真三维AFM及其用于减少针尖磨损的矢量探测技术,可应用于各种纳米结构的真三维测量.介绍了可用于平面和中等曲面面形绝对测量的两种方法:差分型激光束偏转法和可溯源多路传感器法(TMS).讨论了面形测量中存在的挑战性难题.介绍了可用于面形测量的高精度三坐标测量机.
Geometry measurement technology is widely used in the optical manufacturing industry to detect the quality of parts and control the production process, which is the core technology of optical manufacturing. It involves the measurement of geometric quantities of micro and nano structures, as well as planar, spherical, aspherical, ruled surfaces and free-form surfaces In this paper, we review some of the metrology techniques supported by the German Federal Institute of Physics and Technology, and introduce a large-scale metrology AFM with a measuring range of 25 mm × 25 mm × 5 mm A novel AFM probe (ACP) was introduced to realize the direct and non-destructive measurement of the sidewall morphology of the micro / nano structure. A real 3D AFM using Flared AFM probe and Its vector detection technique for reducing tip wear can be applied to true 3D measurements of various nanostructures.Two methods for absolute measurement of planar and medium surface profiles are introduced: differential laser beam deflection and traceable Road sensor method (TMS), discusses the challenging problems in surface profiling, and introduces a high-precision CMM that can be used for surface profiling.