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首次利用前馈三层神经网络模型 ,建立了场发射薄膜的膜厚的神经网络预测模型 ,用金刚石薄膜的膜厚数据进行验证 .结果表明 ,该模型预测的相对误差小于 6.1 % .
For the first time, a three-layer feedforward neural network model was used to establish the neural network prediction model of the film thickness of field emission film, which was verified by the film thickness data of diamond film. The results showed that the relative error of this model was less than 6.1%.