采用溶胶-凝胶工艺在普通载玻片上制备出C轴择优取向的ZnO∶Al透明导电薄膜。利用扫描电镜(SEM)、X射线衍射仪(XRD)等分析手段对薄膜进行了表征,重点研究了薄膜表面形貌与导电性的关系。结果表明,薄膜具有骨架型网状结构,网状越密集其导电性越好;同时,用高倍数扫描电镜扫描所得的图像越清晰,薄膜的导电性越好。 The C: axis preferred orientation ZnO: Al transparent conductive thin films were prepared on common glass slides by sol-gel process. The films were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD) and other analytical methods. The relationship between surface morphology and electrical conductivity was mainly studied. The results show that the film has a skeleton-like network structure, the more dense the network its conductivity is better; the same time, the higher the magnification of scanning electron microscopy images obtained clearer, the better the conductivity of the film.