在一台长脉冲放电泵浦ＫｒＦ准分子激光器上，对采用腔内倾斜标准具法压缩线宽进行了研究．采用平行平面腔结构，在谐振腔中加入小孔光阑以控制横模振荡，并加入０．１ｍｍ空气隙、０．５ｍｍ固体和３ｍｍ固体三个标准具体作为线宽压缩元件，实验中研究了不同光阑孔径及输出耦合率对输出线宽和输出能量的影响．实验获得的线宽小于３ＧＨｚ，相当于线宽压缩一千倍． In a long pulse discharge pump KrF excimer laser, the use of the cavity tilt etalon compression line width was studied. A parallel plane cavity structure is adopted, a small aperture diaphragm is added in the cavity to control the transverse mode oscillation, and 0.1 mm air gap, 0.5 mm solid and 3 mm solid are specifically added as the line width compressing element. In the experiment, Effect of Different Diaphragm Aperture and Output Coupling Rate on Output Linewidth and Output Energy. The experimental linewidth is less than 3GHz, equivalent to a thousand times the linewidth compression.