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在放电泵浦ＸｅＣｌ准分子激光器上，对放大率Ｍ从１．８０到２０．５６共六种虚共焦非稳腔在放电电压为２０ｋＶ下的水平、竖直方向的束散角θ＿（１１Ｍ）．θ＿（⊥Ｍ）进行了系统的实验研究，并从理论上计算了本实验条件下的衍射极限ＤＬ＿（１１Ｍ）．ＤＬ＿（⊥Ｍ）。
In the discharge pump XeCl excimer laser, the magnification M from 1.80 to 20.56 a total of six kinds of virtual confocal unstable chamber at a discharge voltage of 20kV level, the vertical beam angle θ_ (11M ). θ_ (⊥M) were systematically studied and the diffraction limit DL_ (11M) under the experimental conditions was theoretically calculated. DL_ (⊥ M).