设计了一种工业用螺旋形状表面板电容式相浓度传感器，采用三维有限元方法对传感器结构进行优化设计，其检测场均匀性误差低于５ ％ ，有效地减小了相分布及流型变化对测量的影响；与电容式速度传感器组合成一体化装置，可用于在线测量气／固两相流质量流量。在现场与电子秤比对，整机精度误差小于５ ％ 。 An industrial spiral shape surface plate capacitive phase density sensor was designed. The three-dimensional finite element method was used to optimize the structure of the sensor. The error of detection field uniformity was less than 5%, which effectively reduced the phase distribution and flow pattern change The impact on the measurement; Combined with the capacitive speed sensor into an integrated device can be used to measure gas / solid two-phase flow online. In the field and electronic scales than the machine accuracy error of less than 5%.