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室温下通过磁控溅射在表面热氧化的Si基片上生长了MgO/FexPt100-x双层膜和FexPt100-x单层膜系列样品,FexPt100-x的原子成分x=48—68.研究了热处理前后不同成分FePt薄膜的晶体结构和磁性的变化,尤其是MgO底层的引入对FePt的晶体结构和磁性的影响.实验结果显示,直接生长在基片上的FePt薄膜具有较强的(111)织构,而经过MgO底层诱导,所有不同成分的制备态FePt薄膜都表现出一定的(001)取向.热处理后,单层膜样品的强烈(111)织构基本不变,当Fe和Pt接近等原子比即52∶48时,薄膜最容易发生有序化;对于生长在MgO底层的FePt薄膜,所有样品的(001)织构在退火后显著增强,有序化对FePt成分的依赖完全不同于单层膜的情形.当Fe和Pt原子比为59∶41时,生长在MgO底层上的FePt薄膜最容易有序化,表现出非常好的垂直易磁化特性,通过MgO底层对FePt薄膜微结构进而对其有序化的影响,对此进行了解释.
At room temperature MgO / FexPt100-x bilayer and FexPt100-x monolayer films were grown on the surface thermally oxidized Si substrate by magnetron sputtering. The atomic composition of FexPt100-x was x = 48-68. The effects of heat treatment The changes of crystal structure and magnetism of FePt thin films with different compositions before and after, especially the influence of the introduction of MgO on the crystal structure and magnetic properties of FePt films, have been studied.The experimental results show that the FePt films grown directly on the substrate have a strong (111) texture , Whereas the FePt films of all the different compositions show some (001) orientation induced by the MgO substrate.After heat treatment, the intense (111) textures of the single-layer films are almost unchanged, and when the Fe and Pt atoms are close to the atoms Ie, 52:48, the (001) texture of all the samples grown on the MgO underlayer is significantly enhanced after annealing. The dependence of ordering on the FePt composition is completely different from that of the single In the case of Fe:T, the FePt thin films grown on the MgO underlayer were the most easily ordered with the Fe and Pt atomic ratio of 59:41, showing very good vertical magnetizability. The microstructure of the FePt thin films The effect of its ordering is explained.