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作为超精密隔振系统的核心部件,超磁致伸缩微致动器的工作性能直接影响隔振精度。在建立超磁致伸缩微致动器的轴对称模型的基础上,利用有限元方法对致动器的磁场进行分析,并通过数值积分方法计算在不同励磁电流下超磁致伸缩棒的伸长量,根据计算结果对致动器的线性工作范围作出了有效的估计。
As a core component of the ultra-precision vibration isolation system, the working performance of the giant magnetostrictive microactuator directly affects the vibration isolation accuracy. Based on the axisymmetric model of the giant magnetostrictive microactuator, the magnetic field of the actuator was analyzed by the finite element method and the elongation of the giant magnetostrictive rod under different excitation currents was calculated by the numerical integration method Based on the calculation results, the linear operating range of the actuator is effectively estimated.