日本科学技术厅无机材质研究所决定从1986年开始进行一项新的特别研究,以便将用气相法合成的膜状金刚石应用于半导体、半导体基板等电子材料及发光材料。金刚石不仅硬度大,而且电子迁移率比硅还高,其传热性、光学特性也很优异,是一种引人注目的电子、光学功能材料。尤其是该研究所,在常温、常压下以气相法合成膜状金刚石成功以来,其作为一种新型功能性材料正在受到重视。日本无机材质研究所经过五年的研究,进 Japan Institute of Science and Technology Agency for Inorganic Materials decided in 1986 to begin a new special study for the vapor phase synthesis of film-shaped diamond used in semiconductor, semiconductor substrates and other electronic materials and luminescent materials. Diamond is not only hard, but also higher electron mobility than silicon, its heat transfer, optical properties are also very good, is a compelling electronic and optical functional materials. In particular, the Institute, as a new type of functional material, is gaining attention since the successful synthesis of membranous diamond by gas phase at normal temperature and pressure. Japan Institute of Inorganic Materials after five years of research into