一、概况清华大学电子系半导体车间位于该校主楼东配楼的底层,是利用原教学楼的一部分改建而成。1975年6月试运行。改建建筑面积840米~2,其中洁净间316米~2(占30％)。新建机房250米~2(占23％)。 (一) 建筑处理车间的平、剖面图见图1、图2。原建筑层高为4米,现改为2.54米。地面铺3毫米厚的软聚氯乙烯板,墙四角抹成R=50毫米的圆角,外抹水泥砂浆打底后,涂三道白色乳胶漆罩面。室内用塑料复合钢板吊顶,楼道、更衣间用尿醛五夹板吊顶。洁净间分为14间。四周设有宽1.4米的参观走廊。参观走廊外窗在原木窗基础上加 I. Overview The Department of Electronics of the Tsinghua University Semiconductor Workshop is located on the ground floor of the East Building of the main building of the school. It is a part of the original school building that was rebuilt. June 1975 trial operation. The converted building area is 840 meters~2, among which clean room is 316 meters~2 (30%). The new equipment room is 250m~2 (23%). (a) The flat and sectional views of the building treatment workshop are shown in Figs. 1 and 2. The original building has a height of 4 meters and is now 2.54 meters. The floor is covered with a soft PVC sheet of 3 mm thickness. The corners of the wall are rounded to a radius of R=50 mm. After the outer surface is covered with cement mortar, three white latex paint finishes are applied. Indoor plastic composite steel plate ceiling, corridors, locker room with urine five plywood ceiling. There are 14 clean rooms. There is a 1.4-metre-wide visiting corridor. Visit the outside window of the corridor to add the original wooden window