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本文研究了LP-MOCVD对不同x值的In1-xGaxAs/InP生长条件,并且生长了压缩应变为0.5%三个不同阱宽的InGaAs/InP量子阱结构,利用77KPL光谱分析了能级同阱宽的关系,实现最窄阱宽为4.4nm,最小全半高峰宽为17.0mev。
In this paper, the In1-xGaxAs / InP growth conditions of LP-MOCVD for different x values were studied, and InGaAs / InP quantum well structures with compressive strain of 0.5% and three different well widths were grown. Well width relationship to achieve the narrowest well width of 4.4nm, the minimum full width at half maximum of 17.0mev.