利用扫描电子显微镜 (SEM )及氘的定量深度分布测量 ,系统地研究了在氘离子轰击下金属钨和钼的损伤情况 ,特别是钨表面气泡的形成及机制 ,以及氘在表面层的滞留量和气泡形成机制之间的关系。D+离子能量为 10 0eV— 1keV ,轰击剂量为 1× 10 19— 1× 10 2 1D+/cm2 。轰击过程中靶表面温度分别控制在室温、6 0 0℃和 80 0℃。 Using scanning electron microscopy (SEM) and deuterium quantitative depth distribution measurement, we studied systematically the damage of tungsten and molybdenum metal under the deuterium ion bombardment, especially the formation and mechanism of the bubble on tungsten surface and the deuterium retention in the surface layer And bubble formation mechanism of the relationship between. D + ion energy of 10 0eV-1keV, bombardment dose of 1 × 10 19- 1 × 10 2 1D + / cm2. During the bombardment, the target surface temperatures were controlled at room temperature, 600 ° C and 80 ° C, respectively.