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采用阳极氧化的方法,通过改变电压的施加方式制备了具有不同形貌的氧化钛薄膜。使用扫描电子显微镜考察了氧化钛薄膜的形貌,结合实验现象探讨了阳极氧化钛薄膜纳米孔的形成机制。研究结果表明,采用一步施加电压和连续施加电压的方法,氧化钛薄膜纳米孔的形成过程由电压、阻挡层的厚度决定;采用两步施加电压的方法,氧化钛薄膜纳米孔的形成过程由放电电压、阻挡层的厚度和阻挡层/电解液的边界条件协同控制。在相同工艺条件下,采用两步施加电压法能够扩展阳极氧化钛薄膜纳米孔孔径和孔密度的范围。
Anodic oxidation was used to prepare titanium oxide films with different morphologies by changing the application of voltage. Scanning electron microscopy was used to investigate the morphology of titanium oxide films. The formation mechanism of the anodic titanium oxide film nanopores was discussed based on the experimental phenomena. The results show that the formation process of the nano-holes of titanium oxide film is determined by the voltage and the thickness of the barrier layer by one-step application of voltage and continuous application of voltage. The formation of the nano-holes of titanium oxide film is controlled by the discharge The voltage, the thickness of the barrier and the barrier / electrolyte boundary conditions are controlled in concert. Under the same process conditions, the two-step applied voltage method can expand the range of nanopore diameter and pore density of the anodized titanium film.