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叙述了采用金属有机物钛酸四乙脂取代四氯化钛,运用PCVD外加热法沉积Ti(CN)涂层,其显微硬度可达1600kg/mm~2,涂层结构仍为柱状晶.
Described the use of tetraethoxy titanium tetrathiocarbamate instead of titanium tetrachloride, the use of PCVD external deposition of Ti (CN) coating deposition, the microhardness up to 1600kg / mm ~ 2, the coating structure is still columnar crystals.