论文部分内容阅读
英国初创公司Cambridge Semiconductor在2004年旧金山召开的国际电子器件会 (IEDM)上推出一种侧向功率半导体器件,其技术基于MEMS工艺技术,被称为SON (Silicon-on-Nothing)。这种侧向功率半导体器件是一种最快的高压侧向绝缘门双极型晶体
British semiconductor startup Cambridge Semiconductor introduced a lateral power semiconductor device at the 2004 International Electron Devices Conference (IEDM) in San Francisco. The technology is based on MEMS technology called SON (Silicon-on-Nothing). This lateral power semiconductor device is one of the fastest high-voltage lateral isolation gate bipolar crystals