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一、引言扫描电镜中X光能谱仪的重要组成部分锂漂移硅Si(Li)探测器及场效应晶体管需要用液氮冷却,目的是防止锂漂移硅中的锂反向扩散和降低热噪音。杜瓦瓶内的液氮通过一个称为冷指的金属棒使场效应晶体管和探测器冷却。杜瓦瓶长期使用后真空度将自然下降,液氮消耗量增加,不仅增加保养负担,也会影响仪器的使用性能,必须及时恢复其真空度。若返原厂修复,费用昂贵。我们利用实验室现有的真空喷镀仪的真空系统对杜瓦瓶重抽真空,实践证明,效果很好。
I. INTRODUCTION An important part of the X-ray spectrometer in SEM is that the lithium-drift silicon Si (Li) detector and field-effect transistor need to be cooled with liquid nitrogen in order to prevent reverse lithium diffusion and thermal noise reduction in Li-drift silicon. . The liquid nitrogen in the Dewar vaporizes the field effect transistor and the detector through a metal rod called a cold finger. Dewar long-term use of the vacuum will naturally decline, liquid nitrogen consumption increases, not only increase the maintenance burden, but also affect the performance of the instrument, you must promptly restore the vacuum. If the original factory repair, expensive. We use the vacuum chamber vacuum deposition system available in the laboratory re-vacuum Dewar, proved very effective.