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从软故障的产生机制出发 ,研究了软故障的作用模式 .为了计算软故障的关键面积 ,将互连线分为接触区和导电通道两部分来处理 ,并推导出了总的计算公式 .最后通过对一个 4× 4移位寄存器的软故障关键面积的计算 ,说明了在不同粒径缺陷情况下 ,软、硬故障对电路的影响程度
Based on the mechanism of soft fault, the mode of soft fault is studied. In order to calculate the critical area of soft fault, the interconnection is divided into two parts: contact area and conductive path, and the general formula is deduced. Through the calculation of the critical area of a 4 × 4 shift register soft fault, the influence of soft and hard faults on the circuit under different particle size defects is illustrated