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利用纳米压痕载荷-位移曲线计算了直流脉冲磁控溅射镍涂层的硬度、弹性模量和接触刚度。研究了溅射功率和偏压对镍涂层结构和力学性能的影响。结果表明,随溅射功率的增大,镍涂层生长取向均呈无择优生长状态,弹性模量、接触刚度变化不大,硬度先增加后减小。偏压增大会使镍涂层呈现明显的(111)取向生长,接触刚度增大,弹性模量和硬度都先增大后减小。
The hardness, elastic modulus and contact stiffness of DC pulsed magnetron sputtering nickel coating were calculated using nanoindentation load - displacement curves. The effects of sputtering power and bias on the structure and mechanical properties of nickel coatings were investigated. The results show that with the increase of sputtering power, the growth orientation of the nickel coating shows no growth, the elastic modulus and the contact stiffness change little, and the hardness first increases and then decreases. The bias voltage increases the apparent (111) orientation of the Ni coating, and increases the contact stiffness and the elastic modulus and hardness first increase and then decrease.