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采用射频磁控溅射法在石英和载玻片衬底上淀积纳米TiO2薄膜。利用X射线衍射仪、原子力显微镜、紫外可见分光计和接触角仪对薄膜相结构、表面形貌、光学性能和光致亲水性能进行表征。结果表明:在高压汞灯的辐射下,薄膜呈现出从疏水到亲水性能的转变。TiO2薄膜的光致亲水性能与衬底有关,载玻片衬底的TiO2薄膜的光致亲水性能优于石英玻璃衬底。载玻片衬底上淀积的薄膜经高压汞灯辐射240min后呈现出超亲水性能。讨论了薄膜的能隙、Ti3+缺陷位和衬底对TiO2薄膜的光致亲水性能的影响。
Nano-TiO2 films were deposited on quartz and glass substrates by RF magnetron sputtering. The phase structure, surface morphology, optical properties and photo-hydrophilic property of the films were characterized by X-ray diffraction, atomic force microscopy, UV-vis spectrometer and contact angle meter. The results show that the film exhibits a change from hydrophobic to hydrophilic under the irradiation of high pressure mercury lamp. The photo-hydrophilic property of TiO2 film is related to the substrate, and the TiO2 film of slide glass substrate has better photo-hydrophilic property than that of quartz glass substrate. The films deposited on the glass substrate exhibited superhydrophilic properties after being irradiated with high pressure mercury lamp for 240 min. The effects of the energy gap, Ti3 + defect sites and the substrate on the photocatalytic activity of TiO2 films are discussed.