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本文报道了新型Ta_2O_5压电膜的制备方法及其工艺技术。用×轴垂直取向性Ta_2O_5压电膜制作出了声表面波(SAW)延迟线及滤波器。并给出了相应的实验结果。
This paper reports the preparation of a new type of Ta_2O_5 piezoelectric film and its process technology. Surface acoustic wave (SAW) delay lines and filters were fabricated using x-axis vertical-orientation Ta 2 O 5 piezoelectric films. And the corresponding experimental results are given.