利用表面增强激光喇曼光谱仪测量了Fecrallor(Fe－22Cr－5Al－0.3Y)合金表面Al2O3膜及Co－40－Cr合金表面Cr2O3膜的残余应力.实验条件下,两种氧化膜残余应力值分别为2GPa和1.7GPa.如果Co－40Cr合金离子注入3*1017Y+/cm2;或者Cr2O3膜发生破裂,Cr2O3膜的残余应力值显著降低.该测试方法简便,并可用于测量氧化膜内微区应力及应力分布,还可实现高温下原位测量氧化股应力.“,”The measurements of residual stresses in Al2O3 formed on Fecralloy (Fe-22Cr-5Al-0.3Y) and in Cr2O3 formed on Co-40Cr and 3*10Y+/cm2 implanted Co-40Cr alloy were carried out by Surface Enhanced Raman Spectroscopy. The residual stresses in these two kind of oxide scales were about 2GPa. If the oxide scale cracked, or the oxidized alloy was implanted with rare earth elements, the residual stress would decrease remarkably. This technique also could be further developed to measure local stress distribution in the oxide scale and to apply for in-situ measurements at high temperature.