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一、前言半导体压力传感器是利用硅的压电电阻效应所产生的压力来进行测量的仪器。它是把检测的压力机械量变换为电信号的元件组装在硅晶体上。这种传感器是一种应用范围很广泛的
I. Introduction Semiconductor pressure sensor is the use of silicon piezoresistive effect of the pressure generated by the instrument. It is to detect the pressure of the amount of mechanical conversion of electrical signals assembled on the silicon crystal. This sensor is a wide range of applications