国外在八十年代初期开始微机械微电子系统(以下简称微机电系统)的研究工作。经过十五年左右的努力,微机电系统中的微型惯性器件的研制工作取得了很大的进展。微型惯性器件的出现,可以说是惯性技术领域又一次新的变革。科学技术的发展真是日新月异。从电子管到晶体管,到大规模集成电路,电子产品的 Abroad in the early eighties began micro-mechanical microelectronics system (hereinafter referred to as MEMS) research work. After fifteen years of hard work, the development of miniature inertial devices in MEMS has made great progress. The emergence of miniature inertial devices can be said that the inertial technology is another new revolution. The development of science and technology is changing rapidly. From tubes to transistors, to large scale integrated circuits, electronic products