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采用Ｘ光电子能谱（ＸＰＳ）和紫外光电子能谱（ＵＰＳ）研究了软Ｘ射线辐照ＩｎＰ所产生的表面电子态的变化．实验结果表明，软Ｘ射线的照射，对Ｉｎ原子影响不大，而对Ｐ原子影响很大．分析了ＩｎＰ的辐照效应机理，解释了产生上述影响的原因
X-ray photoelectron spectroscopy (XPS) and ultraviolet photoelectron spectroscopy (UPS) were used to study the changes of surface electronic states generated by soft X-ray irradiation. The experimental results show that the soft X-ray irradiation has little effect on In atoms and great influence on P atoms. The mechanism of irradiation effect of InP was analyzed, and the reason for the above effect was explained