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采用扫锚电子显微镜(Scanning Electron Microscope,SEM)对CrN/MoS2固体自润滑复合膜表面形貌进行了观察,利用X射线光电子能谱(X-ray Photoelectron Spectroscopy,XPS)和俄歇电子能谱仪(Auger Electron Spectrosco-py,AES)对复合膜渗硫层的相结构及剖面元素分布进行了研究。结果表明:经低温离子渗硫处理后,在复合涂层中成功合成MoS2自润滑相,并伴有少量SO2、CrSO4生成。研究发现:渗硫层被氧化是源于渗硫过程中残留的氧气和样品保存过程中接触的空气;用真空封装等隔氧保存方式可防止样品存储过程中渗硫层被氧化;改善渗硫工艺,杜绝渗硫过程中渗硫层被氧化,可以获得单一成分的MoS2层。
The surface morphology of CrN / MoS2 solid self-lubricating composite films was observed by Scanning Electron Microscope (SEM). X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (Auger Electron Spectrosco-py, AES) was used to investigate the phase structure and cross-section element distribution of the sulphide layer in the composite film. The results showed that the MoS2 self-lubricating phase was successfully synthesized in the composite coating with a small amount of SO2 and CrSO4 after low temperature ionized sulfurizing treatment. It is found that the sulfurized layer is oxidized due to the residual oxygen during the sulfurizing process and the air contacted during the sample storage. The oxygen barrier method such as vacuum packaging can prevent the sulfurized layer from being oxidized during sample storage. Process, to prevent the infiltration of sulfur during the infiltration of sulfur layer, you can get a single component of the MoS2 layer.