上称重提拉法晶体生长模型由上缩颈、放肩、等颈、收肩、下缩颈和收尾拉脱等组成,每种晶体分别配有不同的生长模型,由监控站根据工艺要求指定执行对应的生长程式。为确保生长程式的集中发布和准确执行,系统采用基于Modbus-TCP的可编程控制器,将生长工艺发送至生产设备。晶体重量与温度回路采用串级控制,数据表明晶体生长稳定,等颈误差小于±0.2 mm。 On the weight of the Czochralski crystal growth model by the neck, put the shoulder, such as the neck, close the shoulder, the next necking and closing the pull off and so on, each crystal with a different growth model, the monitoring station according to process requirements Specify the implementation of the corresponding growth program. To ensure the centralized release and accurate execution of growth programs, the system uses a programmable controller based on Modbus-TCP to send the growth process to the production facility. Crystal weight and temperature loop using cascade control, the data show that the crystal growth stable, equal neck error of less than ± 0.2 mm.