通过大量实验和计算机理论计算,研制出三环结构的场致发射冷阴极球形振荡器规。它具有灵敏度高(K=15帕~(-1)),结构简单,离子聚焦成束地被收集,能抑制轨道模式等特点。应用场致发射冷阴极的成功克服了热阴极给极高真空测量和获得方面带来的限制因素,是解决极高真空测量问题的关键一步。 Through a large number of experiments and computer calculations, developed a tricyclic structure of the field emission cold cathode spherical oscillator gauge. It has the characteristics of high sensitivity (K = 15 Pa ~ (-1)), simple structure, ion focusing in bundles and restraining orbit mode. The success of the field-emission cold cathode overcomes the limitations of the hot cathode for extremely high vacuum measurement and acquisition and is a crucial step toward resolving extremely high vacuum measurement problems.