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高分辨率、快速、高清洁度的超微粒干版已成了大规模集成电路会战中关键的基础材料之一。在北京市大规模集成电路会战办公室的领导下,北京市从74年7月份组成超微粒干版会战攻关小组,在会战单位清华大学、地质仪器厂、771所,中国科学院半导体所及北京制版炼油厂等单位大力帮助下,二年来在乳剂实验、工艺控制及创造生产条件等方面都分别做了一些工作,现将这些工作简单介绍如下。
Ultra-fine dry, high-resolution, fast, clean disks have become one of the key building blocks for large-scale integrated circuit (IC) battles. Under the leadership of Beijing Municipality's Office of Battle of Large Scale Integrated Circuits, Beijing Municipality formed a team of ultra-fine particle dry-board battles in July 74. At the conference, Tsinghua University, Geological Instrument Factory, 771 Institute of Semiconductors, Chinese Academy of Sciences and Beijing Platemaking Refining Plant and other units with the great help, two years in the emulsion experiments, process control and create conditions for production and so have done some work, these are now briefly described below.