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定容式流导法微流量校准装置是气体微流量的计量标准 ,可采用定容法和流导法对气体微流进行校准 ,校准范围为 (5× 10 -2 ～ 5× 10 -11)Pa·m3 /s,合成标准不确定度为 0 .5 6 %～ 1.7%。
The constant flow conductivity method microfluidic calibrating device is the measurement standard of the gas micro-flow. The calibration of the micro-flow of the gas can be performed by the constant volume method and the conduct method. The calibration range is (5 × 10 -2 ~5 × 10 -11) Pa · m3 / s, the synthetic standard uncertainty of 0.56% ~ 1.7%.