,Macro-pyramid in GaN Film

来源 :中国物理快报(英文版) | 被引量 : 0次 | 上传用户:crazyinlove_2008
下载到本地 , 更方便阅读
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
A thin film of GaN with the thickness of 1.0μm was grown on α-Al2Oa substrate by metal organic chemical vapour disposition and then a thick GaN film with thickness of 12μm was grown in the halide vapour phase epitaxy system. Some macro-pyramids appeared on the surface of the sample. The macro-pyramids made the surfaceof the GaN film rough, which was harmful to the devices made by GaN materials. These defects changed the distribution of carrier concentration and affected the optical properties of GaN. The step height of the pyramids was about 30-40 nm measured by atomic force microscopy. A simple model was proposed to explain the macro- pyramid phenomenon compared with the growth spiral The growth of the macro-pyramid was relative to the physical conditions in the reaction zone. Both increasing growth temperature and low pressure may reduce the pyramid size.
其他文献
The Fermi surface topology of Na0.5CoO2 is studied using the hybrid density functional theory. We first study a single (CoO2)0.5- layer model with the percentag
期刊
The binding energy of the six quark system with strangeness s = -5 is investigated by the SU (3) chiral constituent quark model. The single Ξ*Ω channel calcul
期刊
The results of two Monte Carlo generators for production of Bc mesons in pp collisions are compared at the large hadron collider energy √s = 14 TeV. In the stu
期刊
将1956—1981年的资料用统计学方法进行了分析,结果认为,降水量影响产量的关键时期是12月份,12月份每增加1毫米降水,气象产量相应增加2.65斤。2月和5月的降水多少对产量也有
有效教学所追求的是在教学过程中找到学生兴趣与教学内容选择间的平衡点,找到教师的教与学生的学间的平衡点,找到师生的共同努力的契合点,在有限的教学时间里让学生尽可能的
The ultrashort pulse laser writing multi-layered data bits in fused silica for three-dimensional optical data storagethrough the mechanism of optical damage ind
期刊
通过对本院癌痛患者麻醉药品临床应用情况的调查分析,探讨如何提高麻醉药品用药水平,提高临床规范化治疗癌痛水平。发现本院对癌痛的治疗水平及规范合理使用麻醉药品的水平还有
近年来我国有关调查表明,心理疾病已经成为当前危害我国青少年身心健康的一大突出问题,这已经引起了学校、家长和社会的普遍关注。
期刊
试卷讲评课是复习阶段常见而重要的一种课型。考试后的讲评是教学的一个重要环节,是复习课的继续与深化。通过讲评可以矫正错误、调控教学、反馈信息,并使学生在这一过程中巩固旧知识,获取新知识,完善知识结构,开拓思路,提高思维能力。然而,现实中我们的很多讲评课是无效或者说是低效的。究其原因,大概与学生的能力、教师的讲解、题目的难度等各种因素有关,但教师的教学方法是关键。那么,如何提高试卷讲评的有效性呢?在此
The structure of the channel wave functions of 6Li is studied qualitatively. It is found that the widths of the low-lying resonances can be in general explained
期刊