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采用室温直流反应磁控溅射技术在纳米晶体钛表面制备掺钽TiO_2薄膜,研究了掺Ta量对纳米晶体钛基TiO_2薄膜摩擦磨损性能的影响。结果表明:在室温模拟人体体液条件下,掺钽TiO_2薄膜与不锈钢淬火钢球(Φ4mm)对摩的磨损率为10~(-6)-10~(-5)mm~3·m~(-1) N~(-1)级;随着Ta含量的增加,薄膜的摩擦系数和磨损率呈先减小后增加的趋势,掺Ta量(质量分数)为22%Ta的TiO_2薄膜具有最低的摩擦系数(0.20)和磨损率(1.5×10~(-6)mm~3·m~(-1)·N~(-1)。具有良好的抗磨性能与其硬度与弹性模量比高、抗腐蚀性强和摩擦系数低一致。
The tantalum-doped TiO_2 films were prepared on the surface of nanocrystalline titanium by DC reactive magnetron sputtering. The effects of Ta content on the tribological properties of nanocrystalline Ti-based TiO_2 films were investigated. The results show that the frictional wear rate of Ta - doped TiO_2 film and stainless steel quenched steel ball (Φ4mm) is 10 ~ (-6) -10 ~ (-5) mm ~ 3 · m ~ (- 1) N ~ (-1). With the increase of Ta content, the friction coefficient and the wear rate of the films decrease first and then increase. The films doped with 22% Ta (mass fraction) The friction coefficient (0.20) and the wear rate (1.5 × 10 -6 mm 3 · m -1 · N -1) have good abrasion resistance and high hardness and elastic modulus ratio, Corrosion resistance and low coefficient of friction.