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研究了用于纳米测量的激光干涉仪中光学波片对非线性误差的影响,基于琼斯矩阵理论建立了多波片的误差分析模型,分析了λ/2和λ/4波片引起的干涉仪非线性误差,对波片位置引起的非线性误差进行了实验研究。结果表明,波片位置调整精度对干涉仪测量影响巨大,在0～5°范围内,λ/2波片和λ/4波片引起的非线性误差分别为6.5nm和9.5nm。上述研究结果为单频偏振激光干涉仪光路调整及非线性误差的补偿提供了参考。
The influence of the optical wave plate on the nonlinear error in the laser interferometer used for the nanometer measurement was studied. The error analysis model of the multi-wave plate was established based on the Jones matrix theory. The interferometer caused by the λ / 2 and λ / 4 wave plates Nonlinear error, the nonlinear error caused by the position of the wave plate was experimentally studied. The results show that the accuracy of the position adjustment of the wave plate has a great influence on the interferometer measurement. The nonlinear errors caused by the λ / 2 and λ / 4 wave plates are 6.5 nm and 9.5 nm respectively in the range of 0 ~ 5 °. The results of the above studies provide a reference for the optical path adjustment and nonlinear error compensation of single-frequency polarization laser interferometer.