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用聚酰亚胺膜选择ＣＶＤ－Ｗ在局部互连中的应用＝ＵｓｅｏｆｓｅｌｅｃｔｉｖｅＣＶＤ－Ｗｗｉｔｈａｐｏｌｙ－ｉｍｉｄｅｍａｓｋｆｏｒｌｏｃａｌｉｎｔｅｒｃｏｎｎｅｃｔｓ［刊，英］／Ｃｏｌ－ｇａｎ，Ｅ．Ｇ．／／Ｊ．Ｅｌｅｃｔｒｏｃｈｅｍ，Ｓｏｃ，－１９９３...
Use of Polyimide Membranes for CVD-W Applications in Local Interconnections = Use of Selective CVD-Wwithapoly-imidemask for Local Interconnects [Col., Eng.] / Col-gan, G. // J. Electrochem, Soc, -1993 ...