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介绍了一种利用脉冲放电氦离子化检测器(PDHID)分析六氟化钨(WF6)中气相杂质的方法。该法利用阀切割技术对WF6主组分进行反吹,避免其进入分析柱及检测器,可准确分析出其中杂质的含量。
A method for analyzing gas phase impurities in tungsten hexafluoride (WF6) by using a pulsed discharge helium ionization detector (PDHID) is presented. The method uses valve cutting technology to backflush the WF6 main component, to avoid its access to the analytical column and detector, which can accurately analyze the content of impurities.