为了避免纳米压印光刻技术与光刻技术混淆,纳米压印光刻技术严谨的专业术语定义是:不使用光线或者辐射使光刻胶感光成形,而是直接在硅衬底或者其他衬底上利用物理学机理构造纳米级别的图形。这种纳米成像技术真正地实现了纳米级别的图形印制。名词术语释义——纳米压印光刻技术 In order to avoid the confusion of nanoimprint lithography and lithography technology, nanoimprint lithography rigorous technical terms are defined: do not use light or radiation to make the photoresist photosensitive forming, but directly on the silicon substrate or other substrate The use of physics to construct nanoscale graphics. This nano-imaging technology really achieves nano-scale graphic printing. Glossary of Terms - Nano Imprint Lithography