由上海吴淞化工厂研制生产的电子纯液氧,电子纯液氮于1985年8月30日由上海市化工局主持,通过鉴定。电子纯液氧、电子纯液氮广泛应用于大规模集成电路的制造工艺中,其中电子纯氧作为光刻剂氧化剂,电子纯氮作为保护剂。此外,这些超纯气体还应用于光导纤维等新兴工业部门。 Electronic pure liquid oxygen developed and produced by Shanghai Wusong Chemical Plant was electronically purified on August 30, 1985 by Shanghai Municipal Bureau of Chemical Industry and passed the appraisal. Electronically pure liquid oxygen, electronically pure liquid nitrogen is widely used in the manufacturing process of large scale integrated circuits, of which electronically pure oxygen as a lithographic agent oxidant, electronically pure nitrogen as a protective agent. In addition, these ultrapure gases are also used in emerging industries such as optical fiber.