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为研究气体组分及微波功率对等离子体特性的影响,测量了大气压下混合气体的微波等离子体光谱强度,分析了不同气体配比和微波功率下等离子体中激发态氧原子发射光谱的变化规律.实验结果表明:随着混入氧气量的增加,等离子体中激发态氧原子数量先增加后减小,在氩气流量为4 L/min,微波输入功率为400 W,氧气流量为40 cm3/min时,激发态氧原子数量达到最大;微波功率的增加首先导致等离子体中的激发态粒子数量增加,进而导致电离态粒子数量增加.
In order to study the effect of gas composition and microwave power on the plasma properties, the intensity of the microwave plasma at atmospheric pressure was measured. The variation of the excited-state oxygen atoms emission spectra under different gas ratios and microwave powers was analyzed The experimental results show that with the increase of mixed oxygen amount, the number of excited oxygen atoms in the plasma first increases and then decreases, with an argon flow rate of 4 L / min, a microwave input power of 400 W and an oxygen flow rate of 40 cm3 / min, the maximum number of excited-state oxygen atoms is reached. The increase of microwave power firstly leads to the increase of the number of excited-state particles in the plasma, which leads to the increase of the number of ionized particles.