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在一台-1型双激发源等离子弧薄膜沉积装置上制取Ti合金化DLC膜,用纳米硬度计、显微硬度计、原子力显微镜以及X射线衍射仪和光电子能谱仪等手段对薄膜的力学性能和结构进行了分析和测定.摩擦磨损试验在一台球-盘滑动磨损试验机上进行.比较了不同钛合金化程度的DLC膜及热处理前后的性能变化.结果表明,薄膜的力学性能与Ti含量有非单值关系,但摩擦系数随Ti含量增加而升高;热处理后薄膜显微硬度显著升高的原因是生成了碳化钛硬化相.
Ti-alloyed DLC films were prepared on a -1-type dual-excitation plasma arc thin film deposition apparatus. The films were characterized by means of nanohardness tester, microhardness tester, atomic force microscope, X-ray diffractometer and photoelectron spectrometer Mechanical properties and structure were analyzed and measured.Friction and wear tests were carried out on a ball-plate sliding wear tester.DLC films with different degrees of titanium alloying and their properties before and after heat treatment were compared.The results showed that the mechanical properties of the films were similar to those of Ti But the friction coefficient increases with the increase of Ti content. The reason for the significant increase of the microhardness of the film after heat treatment is the formation of a solidification phase of titanium carbide.